VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
OLD OXIDIZED Si3N4 COATING  (ION ETCHED: 2KV, 4 MIN)
1

NORM
REGULAR
7
0
0
0
0
0
7

OLD OXIDIZED Si3N4 COATING  (ION ETCHED: 2KV, 4 MIN)
2003
5
10
14
53
39
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
4
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
108
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
512
12
806
0.311316
0.314018
65
0.314018
62
0.314008
70
0.313997
72
0.313986
63
0.313975
55
0.313965
59
0.313954
65
0.313943
53
0.313933
66
0.313922
42
0.313911
65
0.313901
62
0.31389
54
0.313879
57
0.313868
48
0.313858
61
0.313847
64
0.313836
58
0.313826
60
0.313815
60
0.313804
56
0.313793
61
0.313783
51
0.313772
58
0.313761
48
0.313751
57
0.31374
49
0.313729
48
0.313719
55
0.313708
53
0.313697
56
0.313687
50
0.313676
46
0.313665
48
0.313654
64
0.313644
61
0.313633
41
0.313622
49
0.313612
47
0.313601
57
0.31359
64
0.31358
35
0.313569
36
0.313558
40
0.313548
55
0.313537
51
0.313526
49
0.313516
56
0.313505
35
0.313494
48
0.313484
49
0.313473
52
0.313462
56
0.313452
72
0.313441
52
0.31343
55
0.31342
47
0.313409
48
0.313398
47
0.313388
52
0.313377
61
0.313366
51
0.313356
53
0.313345
44
0.313334
40
0.313324
57
0.313313
49
0.313302
46
0.313292
47
0.313281
46
0.31327
38
0.31326
43
0.313249
48
0.313238
60
0.313228
46
0.313217
42
0.313207
57
0.313196
41
0.313185
44
0.313175
46
0.313164
42
0.313153
50
0.313143
39
0.313132
52
0.313121
45
0.313111
45
0.3131
58
0.313089
52
0.313079
38
0.313068
41
0.313058
38
0.313047
39
0.313036
38
0.313026
29
0.313015
28
0.313004
41
0.312994
43
0.312983
37
0.312973
48
0.312962
53
0.312951
53
0.312941
34
0.31293
46
0.312919
46
0.312909
46
0.312898
45
0.312888
51
0.312877
48
0.312866
44
0.312856
54
0.312845
70
0.312835
70
0.312824
63
0.312813
83
0.312803
76
0.312792
85
0.312781
100
0.312771
85
0.31276
116
0.31275
139
0.312739
149
0.312728
181
0.312718
231
0.312707
277
0.312697
297
0.312686
310
0.312675
385
0.312665
420
0.312654
489
0.312644
493
0.312633
526
0.312622
549
0.312612
575
0.312601
680
0.312591
691
0.31258
710
0.31257
729
0.312559
764
0.312548
801
0.312538
760
0.312527
766
0.312517
806
0.312506
773
0.312495
748
0.312485
729
0.312474
666
0.312464
662
0.312453
593
0.312443
581
0.312432
557
0.312421
533
0.312411
467
0.3124
404
0.31239
402
0.312379
351
0.312369
344
0.312358
304
0.312347
283
0.312337
269
0.312326
223
0.312316
216
0.312305
170
0.312295
143
0.312284
142
0.312273
153
0.312263
130
0.312252
117
0.312242
96
0.312231
101
0.312221
76
0.31221
62
0.3122
59
0.312189
61
0.312178
56
0.312168
46
0.312157
51
0.312147
47
0.312136
49
0.312126
38
0.312115
26
0.312105
38
0.312094
36
0.312083
40
0.312073
33
0.312062
36
0.312052
28
0.312041
20
0.312031
17
0.31202
30
0.31201
25
0.311999
27
0.311989
25
0.311978
28
0.311968
28
0.311957
25
0.311947
19
0.311936
29
0.311925
16
0.311915
22
0.311904
23
0.311894
31
0.311883
25
0.311873
23
0.311862
17
0.311852
14
0.311841
25
0.311831
25
0.31182
17
0.31181
25
0.311799
24
0.311789
30
0.311778
25
0.311768
26
0.311757
15
0.311747
27
0.311736
28
0.311726
25
0.311715
24
0.311705
25
0.311694
20
0.311684
26
0.311673
22
0.311663
24
0.311652
21
0.311641
13
0.311631
27
0.31162
24
0.31161
22
0.311599
20
0.311589
20
0.311578
20
0.311568
23
0.311557
20
0.311547
17
0.311536
28
0.311526
25
0.311516
29
0.311505
27
0.311495
15
0.311484
20
0.311474
23
0.311463
17
0.311453
12
0.311442
26
0.311432
18
0.311421
19
0.311411
18
0.3114
24
0.31139
26
0.311379
32
0.311369
26
0.311358
21
0.311348
22
0.311337
16
0.311327
22
0.311316

OLD OXIDIZED Si3N4 COATING  (ION ETCHED: 2KV, 4 MIN)
2003
5
10
14
53
42
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
4
1000
2000
55
0
data_2
data_2
-1
Binding energy
eV
404
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
512
133
2345
0.35906
0.363026
251
0.363026
246
0.36301
261
0.362994
263
0.362978
249
0.362962
241
0.362947
244
0.362931
303
0.362915
256
0.362899
247
0.362884
260
0.362868
251
0.362852
254
0.362836
265
0.362821
239
0.362805
239
0.362789
241
0.362773
239
0.362758
248
0.362742
220
0.362726
255
0.36271
246
0.362695
248
0.362679
236
0.362663
229
0.362647
218
0.362632
216
0.362616
231
0.3626
236
0.362584
242
0.362569
269
0.362553
231
0.362537
238
0.362522
229
0.362506
241
0.36249
239
0.362474
213
0.362459
228
0.362443
233
0.362427
230
0.362412
221
0.362396
262
0.36238
231
0.362364
221
0.362349
227
0.362333
238
0.362317
254
0.362302
229
0.362286
209
0.36227
193
0.362255
229
0.362239
220
0.362223
228
0.362207
232
0.362192
244
0.362176
256
0.36216
196
0.362145
194
0.362129
225
0.362113
211
0.362098
216
0.362082
187
0.362066
213
0.362051
218
0.362035
215
0.362019
244
0.362004
216
0.361988
218
0.361972
224
0.361957
211
0.361941
219
0.361925
240
0.36191
206
0.361894
195
0.361878
224
0.361863
217
0.361847
212
0.361832
212
0.361816
192
0.3618
220
0.361785
212
0.361769
206
0.361753
203
0.361738
233
0.361722
199
0.361706
198
0.361691
205
0.361675
212
0.36166
222
0.361644
203
0.361628
211
0.361613
203
0.361597
204
0.361581
195
0.361566
170
0.36155
170
0.361535
204
0.361519
218
0.361503
217
0.361488
194
0.361472
214
0.361457
202
0.361441
215
0.361425
205
0.36141
225
0.361394
218
0.361379
222
0.361363
215
0.361347
215
0.361332
221
0.361316
216
0.361301
217
0.361285
235
0.36127
237
0.361254
245
0.361238
258
0.361223
246
0.361207
252
0.361192
301
0.361176
285
0.361161
301
0.361145
371
0.361129
369
0.361114
390
0.361098
457
0.361083
492
0.361067
526
0.361052
614
0.361036
651
0.361021
749
0.361005
873
0.360989
968
0.360974
1060
0.360958
1182
0.360943
1374
0.360927
1495
0.360912
1708
0.360896
1834
0.360881
1918
0.360865
1984
0.36085
2136
0.360834
2200
0.360819
2273
0.360803
2345
0.360788
2265
0.360772
2170
0.360756
2155
0.360741
2002
0.360725
1846
0.36071
1793
0.360694
1611
0.360679
1349
0.360663
1271
0.360648
1168
0.360632
1020
0.360617
904
0.360601
836
0.360586
695
0.36057
639
0.360555
557
0.360539
498
0.360524
419
0.360508
404
0.360493
384
0.360477
337
0.360462
320
0.360446
281
0.360431
315
0.360416
303
0.3604
273
0.360385
256
0.360369
232
0.360354
226
0.360338
237
0.360323
227
0.360307
199
0.360292
188
0.360276
195
0.360261
178
0.360245
189
0.36023
202
0.360214
164
0.360199
177
0.360184
213
0.360168
182
0.360153
177
0.360137
184
0.360122
145
0.360106
161
0.360091
198
0.360075
151
0.36006
169
0.360045
164
0.360029
167
0.360014
165
0.359998
161
0.359983
170
0.359967
156
0.359952
176
0.359936
162
0.359921
181
0.359906
174
0.35989
174
0.359875
157
0.359859
160
0.359844
187
0.359829
169
0.359813
181
0.359798
165
0.359782
168
0.359767
154
0.359752
173
0.359736
161
0.359721
171
0.359705
172
0.35969
143
0.359675
133
0.359659
169
0.359644
174
0.359628
172
0.359613
155
0.359598
154
0.359582
148
0.359567
159
0.359551
156
0.359536
157
0.359521
161
0.359505
160
0.35949
158
0.359475
176
0.359459
149
0.359444
158
0.359428
163
0.359413
158
0.359398
162
0.359382
163
0.359367
169
0.359352
148
0.359336
190
0.359321
142
0.359306
150
0.35929
170
0.359275
168
0.35926
177
0.359244
146
0.359229
166
0.359213
175
0.359198
177
0.359183
140
0.359167
153
0.359152
155
0.359137
148
0.359121
160
0.359106
164
0.359091
166
0.359075
190
0.35906

OLD OXIDIZED Si3N4 COATING  (ION ETCHED: 2KV, 4 MIN)
2003
5
10
14
53
42
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
4
1000
2000
55
0
data_3
data_3
-1
Binding energy
eV
538
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
512
0
1883
0.388089
0.392978
67
0.392978
113
0.392958
106
0.392939
125
0.392919
52
0.3929
88
0.39288
58
0.392861
78
0.392841
87
0.392822
78
0.392803
88
0.392783
92
0.392764
51
0.392744
68
0.392725
56
0.392705
96
0.392686
117
0.392666
168
0.392647
69
0.392627
75
0.392608
74
0.392589
21
0.392569
50
0.39255
0
0.39253
51
0.392511
99
0.392491
54
0.392472
56
0.392452
92
0.392433
77
0.392414
97
0.392394
95
0.392375
40
0.392355
48
0.392336
49
0.392317
46
0.392297
75
0.392278
38
0.392258
56
0.392239
94
0.39222
62
0.3922
104
0.392181
3
0.392161
61
0.392142
13
0.392123
101
0.392103
56
0.392084
14
0.392064
48
0.392045
88
0.392026
132
0.392006
93
0.391987
31
0.391968
75
0.391948
93
0.391929
86
0.39191
164
0.39189
64
0.391871
97
0.391852
106
0.391832
83
0.391813
131
0.391793
52
0.391774
65
0.391755
127
0.391735
115
0.391716
100
0.391697
106
0.391677
96
0.391658
66
0.391639
80
0.39162
96
0.3916
82
0.391581
52
0.391562
98
0.391542
60
0.391523
119
0.391504
154
0.391484
96
0.391465
153
0.391446
101
0.391426
59
0.391407
117
0.391388
88
0.391369
127
0.391349
40
0.39133
65
0.391311
43
0.391292
127
0.391272
92
0.391253
80
0.391234
151
0.391214
128
0.391195
36
0.391176
81
0.391157
83
0.391137
91
0.391118
108
0.391099
94
0.39108
138
0.39106
123
0.391041
108
0.391022
117
0.391003
138
0.390983
194
0.390964
110
0.390945
130
0.390926
133
0.390907
162
0.390887
226
0.390868
271
0.390849
254
0.39083
218
0.39081
250
0.390791
344
0.390772
276
0.390753
377
0.390734
407
0.390714
465
0.390695
557
0.390676
570
0.390657
636
0.390638
750
0.390619
841
0.390599
932
0.39058
1035
0.390561
1095
0.390542
1232
0.390523
1333
0.390503
1330
0.390484
1483
0.390465
1602
0.390446
1655
0.390427
1733
0.390408
1697
0.390388
1744
0.390369
1801
0.39035
1846
0.390331
1883
0.390312
1831
0.390293
1763
0.390274
1724
0.390254
1703
0.390235
1557
0.390216
1359
0.390197
1305
0.390178
1196
0.390159
1174
0.39014
943
0.390121
863
0.390101
730
0.390082
632
0.390063
586
0.390044
586
0.390025
465
0.390006
343
0.389987
348
0.389968
274
0.389949
244
0.389929
231
0.38991
230
0.389891
146
0.389872
152
0.389853
148
0.389834
119
0.389815
119
0.389796
96
0.389777
116
0.389758
92
0.389739
94
0.38972
118
0.389701
105
0.389681
87
0.389662
60
0.389643
61
0.389624
65
0.389605
69
0.389586
16
0.389567
71
0.389548
141
0.389529
46
0.38951
57
0.389491
59
0.389472
42
0.389453
40
0.389434
125
0.389415
63
0.389396
69
0.389377
63
0.389358
77
0.389339
79
0.38932
107
0.389301
53
0.389282
89
0.389263
58
0.389244
22
0.389225
61
0.389206
12
0.389187
27
0.389168
28
0.389149
11
0.38913
63
0.389111
107
0.389092
23
0.389073
8
0.389054
38
0.389035
48
0.389016
37
0.388997
63
0.388978
45
0.388959
74
0.38894
82
0.388921
22
0.388902
79
0.388883
56
0.388864
62
0.388845
101
0.388826
59
0.388807
57
0.388788
61
0.388769
40
0.38875
91
0.388731
38
0.388713
43
0.388694
32
0.388675
55
0.388656
26
0.388637
58
0.388618
75
0.388599
57
0.38858
130
0.388561
51
0.388542
47
0.388523
32
0.388504
83
0.388485
40
0.388467
18
0.388448
112
0.388429
79
0.38841
39
0.388391
84
0.388372
37
0.388353
50
0.388334
30
0.388315
87
0.388297
74
0.388278
79
0.388259
45
0.38824
128
0.388221
59
0.388202
14
0.388183
65
0.388164
66
0.388146
58
0.388127
73
0.388108
90
0.388089

OLD OXIDIZED Si3N4 COATING  (ION ETCHED: 2KV, 4 MIN)
2003
5
10
14
53
42
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
4
1000
2000
55
0
data_4
data_4
-1
Binding energy
eV
292
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
512
0
712
0.338811
0.342204
74
0.342204
34
0.34219
9
0.342177
17
0.342163
57
0.34215
54
0.342136
47
0.342123
64
0.342109
80
0.342096
74
0.342082
60
0.342069
0
0.342055
66
0.342042
50
0.342028
46
0.342015
0
0.342001
9
0.341988
92
0.341975
104
0.341961
63
0.341948
56
0.341934
83
0.341921
82
0.341907
41
0.341894
16
0.34188
65
0.341867
47
0.341854
38
0.34184
22
0.341827
30
0.341813
42
0.3418
80
0.341786
61
0.341773
64
0.341759
66
0.341746
73
0.341733
30
0.341719
63
0.341706
63
0.341692
19
0.341679
5
0.341665
8
0.341652
21
0.341639
73
0.341625
44
0.341612
14
0.341598
33
0.341585
53
0.341572
72
0.341558
83
0.341545
35
0.341531
42
0.341518
27
0.341504
54
0.341491
74
0.341478
58
0.341464
57
0.341451
31
0.341437
16
0.341424
67
0.341411
81
0.341397
92
0.341384
63
0.34137
88
0.341357
51
0.341344
68
0.34133
49
0.341317
59
0.341304
76
0.34129
78
0.341277
63
0.341263
60
0.34125
46
0.341237
52
0.341223
24
0.34121
52
0.341196
90
0.341183
65
0.34117
64
0.341156
108
0.341143
16
0.34113
13
0.341116
70
0.341103
87
0.34109
106
0.341076
60
0.341063
88
0.341049
72
0.341036
81
0.341023
76
0.341009
76
0.340996
56
0.340983
72
0.340969
81
0.340956
84
0.340943
76
0.340929
99
0.340916
100
0.340903
72
0.340889
66
0.340876
67
0.340863
77
0.340849
57
0.340836
45
0.340823
50
0.340809
43
0.340796
67
0.340783
42
0.340769
94
0.340756
77
0.340743
53
0.340729
20
0.340716
55
0.340703
103
0.340689
125
0.340676
137
0.340663
99
0.340649
135
0.340636
130
0.340623
107
0.340609
57
0.340596
71
0.340583
65
0.340569
75
0.340556
108
0.340543
112
0.340529
90
0.340516
158
0.340503
107
0.34049
143
0.340476
198
0.340463
127
0.34045
170
0.340436
165
0.340423
196
0.34041
207
0.340396
219
0.340383
255
0.34037
234
0.340357
303
0.340343
375
0.34033
340
0.340317
369
0.340303
413
0.34029
515
0.340277
591
0.340264
582
0.34025
610
0.340237
693
0.340224
712
0.340211
684
0.340197
696
0.340184
690
0.340171
674
0.340157
637
0.340144
679
0.340131
578
0.340118
584
0.340104
550
0.340091
423
0.340078
445
0.340065
372
0.340051
355
0.340038
348
0.340025
314
0.340012
288
0.339998
276
0.339985
225
0.339972
233
0.339959
266
0.339945
212
0.339932
251
0.339919
164
0.339906
188
0.339892
198
0.339879
200
0.339866
161
0.339853
155
0.339839
119
0.339826
181
0.339813
111
0.3398
138
0.339787
90
0.339773
145
0.33976
132
0.339747
97
0.339734
75
0.33972
52
0.339707
46
0.339694
80
0.339681
38
0.339668
77
0.339654
36
0.339641
40
0.339628
54
0.339615
5
0.339601
75
0.339588
65
0.339575
114
0.339562
38
0.339549
40
0.339535
62
0.339522
73
0.339509
71
0.339496
67
0.339483
25
0.339469
73
0.339456
70
0.339443
8
0.33943
49
0.339417
41
0.339404
51
0.33939
38
0.339377
62
0.339364
15
0.339351
79
0.339338
68
0.339324
21
0.339311
31
0.339298
43
0.339285
14
0.339272
70
0.339259
30
0.339245
38
0.339232
79
0.339219
68
0.339206
37
0.339193
48
0.33918
54
0.339166
52
0.339153
30
0.33914
20
0.339127
15
0.339114
29
0.339101
77
0.339087
67
0.339074
47
0.339061
44
0.339048
52
0.339035
57
0.339022
40
0.339008
28
0.338995
52
0.338982
20
0.338969
33
0.338956
36
0.338943
98
0.33893
48
0.338916
46
0.338903
77
0.33889
61
0.338877
64
0.338864
37
0.338851
38
0.338838
31
0.338825
96
0.338811

OLD OXIDIZED Si3N4 COATING  (ION ETCHED: 2KV, 4 MIN)
2003
5
10
14
53
42
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
150
1
0
4
1000
2000
55
0
data_5
data_5
-1
Binding energy
eV
1000
-0.977517
2
counts
d
Transmission
d
pulse counting
0.2
2
4.00E-06
0
0
0
0
2048
166
16735
0.300125
0.586563
1968
0.586563
2018
0.585857
1979
0.585154
2022
0.584452
2152
0.583753
2088
0.583056
2049
0.582362
2103
0.581669
2050
0.580979
1949
0.580291
2032
0.579605
2041
0.578921
1910
0.578239
2110
0.57756
1936
0.576883
2033
0.576207
1915
0.575534
2022
0.574863
2074
0.574194
2112
0.573527
2055
0.572862
2090
0.5722
2101
0.571539
2156
0.57088
2228
0.570223
2299
0.569569
2350
0.568916
2413
0.568265
2319
0.567617
2182
0.56697
2109
0.566325
2077
0.565682
2079
0.565041
1914
0.564402
1987
0.563765
1991
0.56313
1938
0.562497
1908
0.561866
1839
0.561236
1866
0.560609
1917
0.559983
1797
0.559359
1779
0.558737
1767
0.558117
1775
0.557499
1849
0.556882
1767
0.556268
1809
0.555655
1803
0.555044
1868
0.554434
1809
0.553827
1855
0.553221
1828
0.552617
1808
0.552015
1904
0.551415
1825
0.550816
1797
0.550219
1897
0.549624
1871
0.54903
1878
0.548438
1862
0.547848
1761
0.54726
1777
0.546673
1834
0.546088
1904
0.545504
1919
0.544922
1860
0.544342
1809
0.543764
1910
0.543187
1869
0.542612
1777
0.542038
1886
0.541466
1932
0.540896
1900
0.540327
1853
0.53976
1859
0.539194
1876
0.53863
1935
0.538068
1835
0.537507
1859
0.536948
1848
0.53639
1936
0.535834
1981
0.535279
1878
0.534726
1859
0.534174
1862
0.533624
1899
0.533075
1900
0.532528
1881
0.531983
1908
0.531438
1889
0.530896
1823
0.530355
1799
0.529815
1933
0.529277
1881
0.52874
1870
0.528204
1886
0.527671
1947
0.527138
1887
0.526607
1869
0.526077
1869
0.525549
1982
0.525022
1815
0.524497
1926
0.523973
1851
0.52345
1952
0.522929
1943
0.522409
1887
0.521891
2003
0.521374
1890
0.520858
1925
0.520344
1959
0.519831
1948
0.519319
1955
0.518809
1990
0.5183
2000
0.517792
1939
0.517286
2033
0.516781
1974
0.516277
2011
0.515775
1961
0.515274
1947
0.514774
1985
0.514276
2024
0.513778
1917
0.513282
1977
0.512788
2031
0.512294
2084
0.511802
1967
0.511311
1987
0.510822
1958
0.510333
2076
0.509846
1974
0.50936
2076
0.508876
2025
0.508392
1953
0.50791
1969
0.507429
2082
0.506949
1868
0.506471
1972
0.505993
2008
0.505517
1987
0.505042
2021
0.504569
2046
0.504096
1943
0.503625
2017
0.503154
1973
0.502685
2038
0.502217
1996
0.501751
2030
0.501285
2086
0.500821
2065
0.500357
1973
0.499895
1975
0.499434
1944
0.498974
1983
0.498515
2006
0.498058
2038
0.497601
1990
0.497146
1973
0.496692
1948
0.496238
1955
0.495786
2011
0.495335
2030
0.494885
2018
0.494437
2017
0.493989
1947
0.493542
2082
0.493097
1987
0.492652
2054
0.492209
2007
0.491766
2011
0.491325
2045
0.490885
2102
0.490445
2059
0.490007
2027
0.48957
2053
0.489134
2031
0.488699
2043
0.488265
2020
0.487832
2108
0.4874
2039
0.486969
2113
0.486539
2069
0.48611
2086
0.485682
2044
0.485255
2055
0.48483
2021
0.484405
2108
0.483981
2074
0.483558
2122
0.483136
2142
0.482715
2150
0.482295
2086
0.481876
2138
0.481458
2065
0.481041
2047
0.480624
2101
0.480209
2186
0.479795
2052
0.479382
2141
0.47897
2090
0.478558
2114
0.478148
2109
0.477738
2067
0.47733
2080
0.476922
2201
0.476515
2065
0.47611
2098
0.475705
2131
0.475301
2123
0.474898
2066
0.474496
2117
0.474094
2100
0.473694
2067
0.473295
2197
0.472896
2168
0.472499
2159
0.472102
2142
0.471706
2202
0.471311
2116
0.470917
2187
0.470524
2152
0.470131
2210
0.46974
2194
0.469349
2156
0.46896
2200
0.468571
2253
0.468183
2168
0.467796
2224
0.467409
2122
0.467024
2224
0.466639
2228
0.466256
2250
0.465873
2281
0.465491
2246
0.465109
2253
0.464729
2222
0.464349
2223
0.463971
2302
0.463593
2247
0.463215
2139
0.462839
2238
0.462464
2256
0.462089
2173
0.461715
2274
0.461342
2261
0.46097
2253
0.460598
2262
0.460228
2230
0.459858
2290
0.459489
2265
0.459121
2318
0.458753
2287
0.458386
2172
0.45802
2344
0.457655
2329
0.457291
2250
0.456927
2273
0.456564
2244
0.456202
2263
0.455841
2251
0.455481
2290
0.455121
2264
0.454762
2293
0.454403
2380
0.454046
2296
0.453689
2361
0.453333
2363
0.452978
2355
0.452623
2439
0.452269
2316
0.451916
2313
0.451564
2313
0.451213
2341
0.450862
2379
0.450511
2455
0.450162
2377
0.449813
2336
0.449465
2333
0.449118
2254
0.448772
2359
0.448426
2416
0.448081
2267
0.447736
2298
0.447393
2323
0.44705
2375
0.446707
2352
0.446366
2427
0.446025
2329
0.445684
2413
0.445345
2434
0.445006
2401
0.444668
2497
0.44433
2377
0.443994
2430
0.443658
2464
0.443322
2490
0.442987
2421
0.442653
2541
0.44232
2466
0.441987
2455
0.441655
2370
0.441324
2442
0.440993
2416
0.440663
2413
0.440333
2457
0.440005
2530
0.439676
2496
0.439349
2407
0.439022
2428
0.438696
2491
0.438371
2449
0.438046
2387
0.437721
2490
0.437398
2479
0.437075
2367
0.436752
2521
0.436431
2486
0.43611
2449
0.435789
2488
0.435469
2511
0.43515
2559
0.434832
2455
0.434514
2555
0.434196
2566
0.43388
2422
0.433564
2554
0.433248
2612
0.432933
2523
0.432619
2554
0.432305
2563
0.431992
2577
0.43168
2534
0.431368
2567
0.431057
2553
0.430746
2464
0.430436
2483
0.430127
2490
0.429818
2515
0.42951
2519
0.429202
2588
0.428895
2611
0.428588
2522
0.428282
2551
0.427977
2562
0.427672
2594
0.427368
2551
0.427065
2604
0.426762
2542
0.426459
2643
0.426157
2574
0.425856
2622
0.425555
2598
0.425255
2566
0.424955
2712
0.424656
2607
0.424358
2692
0.42406
2678
0.423762
2705
0.423466
2607
0.423169
2699
0.422874
2728
0.422579
2595
0.422284
2609
0.42199
2685
0.421696
2598
0.421403
2631
0.421111
2681
0.420819
2710
0.420528
2727
0.420237
2759
0.419946
2713
0.419657
2704
0.419368
2805
0.419079
2647
0.418791
2734
0.418503
2743
0.418216
2702
0.417929
2739
0.417643
2852
0.417358
2729
0.417073
2630
0.416788
2724
0.416504
2772
0.416221
2717
0.415938
2716
0.415655
2715
0.415373
2782
0.415092
2721
0.414811
2730
0.414531
2858
0.414251
2741
0.413971
2814
0.413693
2839
0.413414
2874
0.413136
2786
0.412859
2731
0.412582
2849
0.412305
2764
0.41203
2794
0.411754
2816
0.411479
2931
0.411205
2885
0.410931
2842
0.410657
2812
0.410384
3052
0.410112
2874
0.40984
2847
0.409568
2935
0.409297
2874
0.409027
2897
0.408757
2800
0.408487
2902
0.408218
2941
0.407949
2814
0.407681
2865
0.407413
2914
0.407146
2992
0.406879
2941
0.406613
2900
0.406347
2872
0.406081
3020
0.405816
3042
0.405552
3018
0.405288
3041
0.405024
2952
0.404761
3029
0.404499
3004
0.404236
3023
0.403975
2983
0.403713
3072
0.403452
3051
0.403192
3064
0.402932
2979
0.402673
3064
0.402414
3061
0.402155
3026
0.401897
2996
0.401639
3118
0.401382
3044
0.401125
3051
0.400868
3190
0.400612
3142
0.400357
3098
0.400102
3113
0.399847
3217
0.399593
3119
0.399339
3129
0.399086
3128
0.398833
3070
0.39858
3205
0.398328
3096
0.398076
3287
0.397825
3294
0.397574
3203
0.397324
3232
0.397074
3276
0.396824
3326
0.396575
3385
0.396326
3316
0.396078
3304
0.39583
3286
0.395583
3352
0.395335
3294
0.395089
3318
0.394843
3209
0.394597
3319
0.394351
3212
0.394106
3182
0.393862
3156
0.393617
3222
0.393374
3281
0.39313
3202
0.392887
3126
0.392644
3150
0.392402
3194
0.39216
3214
0.391919
3160
0.391678
3235
0.391437
3369
0.391197
3552
0.390957
4576
0.390718
6345
0.390479
6151
0.39024
4157
0.390002
3308
0.389764
3298
0.389526
3237
0.389289
3169
0.389052
3213
0.388816
3183
0.38858
3132
0.388344
3240
0.388109
3195
0.387874
3123
0.38764
3184
0.387406
3324
0.387172
3175
0.386939
3190
0.386706
3233
0.386473
3227
0.386241
3204
0.386009
3205
0.385778
3144
0.385547
3202
0.385316
3140
0.385086
3310
0.384856
3223
0.384626
3338
0.384397
3408
0.384168
3276
0.383939
3331
0.383711
3371
0.383483
3299
0.383256
3348
0.383029
3392
0.382802
3412
0.382576
3383
0.38235
3301
0.382124
3371
0.381899
3358
0.381674
3343
0.381449
3383
0.381225
3301
0.381001
3381
0.380777
3361
0.380554
3375
0.380331
3381
0.380109
3378
0.379887
3367
0.379665
3431
0.379443
3456
0.379222
3485
0.379001
3378
0.378781
3437
0.378561
3441
0.378341
3422
0.378122
3498
0.377903
3554
0.377684
3446
0.377465
3419
0.377247
3496
0.37703
3580
0.376812
3576
0.376595
3461
0.376379
3639
0.376162
3494
0.375946
3553
0.37573
3501
0.375515
3532
0.3753
3602
0.375085
3542
0.374871
3561
0.374657
3643
0.374443
3550
0.374229
3598
0.374016
3585
0.373803
3606
0.373591
3584
0.373379
3649
0.373167
3737
0.372956
3576
0.372744
3688
0.372533
3586
0.372323
3564
0.372113
3647
0.371903
3653
0.371693
3658
0.371484
3738
0.371275
3750
0.371066
3793
0.370858
3766
0.37065
3750
0.370442
3783
0.370235
3856
0.370028
3717
0.369821
3739
0.369614
3700
0.369408
3694
0.369202
3669
0.368997
3735
0.368791
3623
0.368586
3556
0.368382
3584
0.368177
3680
0.367973
3624
0.36777
3664
0.367566
3572
0.367363
3576
0.36716
3624
0.366958
3737
0.366755
3727
0.366553
3652
0.366352
3948
0.36615
4056
0.365949
4080
0.365749
4296
0.365548
4320
0.365348
4270
0.365148
4172
0.364948
4131
0.364749
3946
0.36455
3906
0.364351
3664
0.364153
3452
0.363955
3217
0.363757
3069
0.363559
2955
0.363362
2894
0.363165
2778
0.362968
2558
0.362772
2427
0.362576
2453
0.36238
2308
0.362184
2349
0.361989
2271
0.361794
2261
0.361599
2515
0.361404
3695
0.36121
8428
0.361016
16735
0.360823
13502
0.360629
4666
0.360436
2312
0.360243
1863
0.360051
1828
0.359859
1664
0.359667
1755
0.359475
1707
0.359283
1645
0.359092
1714
0.358901
1768
0.358711
1734
0.35852
1761
0.35833
1805
0.35814
1768
0.357951
1724
0.357762
1700
0.357573
1751
0.357384
1779
0.357195
1729
0.357007
1672
0.356819
1775
0.356631
1751
0.356444
1703
0.356257
1750
0.35607
1703
0.355883
1761
0.355697
1765
0.355511
1797
0.355325
1733
0.355139
1840
0.354954
1805
0.354769
1854
0.354584
1904
0.354399
1850
0.354215
1843
0.354031
1868
0.353847
1902
0.353664
1869
0.35348
1864
0.353297
1812
0.353114
1904
0.352932
1837
0.352749
1823
0.352567
1855
0.352386
1861
0.352204
1865
0.352023
1862
0.351842
2009
0.351661
1853
0.35148
1898
0.3513
1906
0.35112
1877
0.35094
1952
0.350761
1994
0.350581
1953
0.350402
1991
0.350223
2046
0.350045
1899
0.349866
1945
0.349688
1970
0.34951
1902
0.349333
1930
0.349155
1949
0.348978
1871
0.348801
1919
0.348625
1922
0.348448
1926
0.348272
1908
0.348096
1823
0.34792
1889
0.347745
1900
0.34757
1906
0.347395
1829
0.34722
1982
0.347045
1979
0.346871
2012
0.346697
2187
0.346523
2479
0.34635
2886
0.346176
2647
0.346003
2298
0.34583
2035
0.345657
2031
0.345485
1933
0.345313
1901
0.345141
2048
0.344969
1877
0.344797
1956
0.344626
1893
0.344455
1943
0.344284
1937
0.344113
1972
0.343943
2035
0.343773
1880
0.343603
1962
0.343433
1952
0.343264
1997
0.343094
1893
0.342925
2011
0.342756
1963
0.342588
1982
0.342419
1989
0.342251
1913
0.342083
1932
0.341916
1964
0.341748
1931
0.341581
2054
0.341414
1961
0.341247
2070
0.34108
2029
0.340914
2007
0.340747
2169
0.340581
2390
0.340416
3202
0.34025
3193
0.340085
2536
0.33992
2052
0.339755
2029
0.33959
1999
0.339425
1905
0.339261
1944
0.339097
1902
0.338933
1884
0.33877
1961
0.338606
1929
0.338443
1988
0.33828
1984
0.338117
2003
0.337954
2066
0.337792
2152
0.33763
2126
0.337468
2161
0.337306
2147
0.337144
2116
0.336983
2084
0.336822
2114
0.336661
2183
0.3365
2073
0.33634
2015
0.336179
2008
0.336019
1985
0.335859
2005
0.3357
1986
0.33554
1958
0.335381
1911
0.335222
1876
0.335063
1957
0.334904
1874
0.334745
1883
0.334587
1846
0.334429
1913
0.334271
1891
0.334113
1883
0.333956
1944
0.333798
2074
0.333641
2686
0.333484
2863
0.333328
3373
0.333171
3749
0.333015
2524
0.332859
1958
0.332703
1934
0.332547
1870
0.332391
1892
0.332236
1836
0.332081
1801
0.331926
1815
0.331771
1821
0.331616
1813
0.331462
1840
0.331308
1817
0.331154
1890
0.331
1888
0.330846
1869
0.330693
1875
0.33054
1844
0.330386
1869
0.330234
1821
0.330081
1873
0.329928
1938
0.329776
1937
0.329624
1913
0.329472
1920
0.32932
1981
0.329169
1985
0.329017
1943
0.328866
1867
0.328715
2001
0.328564
2016
0.328414
1904
0.328263
1995
0.328113
1990
0.327963
2036
0.327813
1994
0.327663
2021
0.327513
2004
0.327364
2012
0.327215
2053
0.327066
2038
0.326917
2104
0.326768
2145
0.32662
2203
0.326472
2157
0.326324
2061
0.326176
2116
0.326028
2158
0.32588
2068
0.325733
2068
0.325586
2151
0.325439
2087
0.325292
2151
0.325145
2085
0.324999
2060
0.324852
2119
0.324706
2192
0.32456
2179
0.324414
2134
0.324269
2150
0.324123
2164
0.323978
2292
0.323833
2345
0.323688
2500
0.323543
2370
0.323399
2456
0.323254
2457
0.32311
2675
0.322966
2622
0.322822
2690
0.322678
2568
0.322535
2573
0.322391
2465
0.322248
2358
0.322105
2369
0.321962
2224
0.321819
2054
0.321677
2072
0.321534
1968
0.321392
1879
0.32125
1801
0.321108
1771
0.320967
1753
0.320825
1745
0.320684
1720
0.320543
1639
0.320401
1748
0.320261
1907
0.32012
2509
0.319979
4195
0.319839
7305
0.319699
9193
0.319559
6783
0.319419
3882
0.319279
2368
0.31914
1752
0.319
1558
0.318861
1394
0.318722
1377
0.318583
1369
0.318444
1366
0.318306
1239
0.318167
1272
0.318029
1234
0.317891
1229
0.317753
1236
0.317615
1268
0.317477
1269
0.31734
1174
0.317203
1231
0.317065
1189
0.316928
1232
0.316792
1265
0.316655
1290
0.316518
1294
0.316382
1383
0.316246
1360
0.31611
1525
0.315974
1522
0.315838
1500
0.315702
1626
0.315567
1671
0.315432
1680
0.315297
1525
0.315162
1498
0.315027
1374
0.314892
1317
0.314758
1152
0.314623
1080
0.314489
1030
0.314355
930
0.314221
894
0.314087
832
0.313954
766
0.31382
788
0.313687
739
0.313554
675
0.313421
620
0.313288
583
0.313155
609
0.313023
684
0.31289
1377
0.312758
4243
0.312626
8393
0.312494
7243
0.312362
3023
0.312231
910
0.312099
394
0.311968
297
0.311837
277
0.311705
247
0.311575
234
0.311444
245
0.311313
218
0.311183
228
0.311052
212
0.310922
233
0.310792
208
0.310662
236
0.310533
233
0.310403
216
0.310273
247
0.310144
220
0.310015
221
0.309886
247
0.309757
207
0.309628
258
0.3095
239
0.309371
255
0.309243
252
0.309115
248
0.308987
244
0.308859
240
0.308731
259
0.308603
238
0.308476
257
0.308349
242
0.308221
267
0.308094
260
0.307967
248
0.307841
245
0.307714
256
0.307588
232
0.307461
239
0.307335
265
0.307209
290
0.307083
261
0.306957
267
0.306832
252
0.306706
271
0.306581
245
0.306455
269
0.30633
265
0.306205
252
0.30608
239
0.305956
289
0.305831
278
0.305707
283
0.305582
282
0.305458
283
0.305334
312
0.30521
313
0.305087
277
0.304963
313
0.304839
308
0.304716
326
0.304593
292
0.30447
329
0.304347
268
0.304224
302
0.304101
290
0.303979
279
0.303856
306
0.303734
295
0.303612
266
0.30349
297
0.303368
295
0.303246
281
0.303124
255
0.303003
293
0.302881
276
0.30276
327
0.302639
325
0.302518
372
0.302397
444
0.302276
449
0.302156
474
0.302035
471
0.301915
500
0.301795
470
0.301674
286
0.301554
224
0.301435
167
0.301315
166
0.301195
207
0.301076
312
0.300956
395
0.300837
457
0.300718
546
0.300599
398
0.30048
290
0.300362
211
0.300243
191
0.300125

OLD OXIDIZED Si3N4 COATING  (ION ETCHED: 2KV, 4 MIN)
2003
5
10
14
53
42
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
100
1
0
4
1000
2000
55
0
data_6
data_6
-1
Binding energy
eV
40
-0.130548
2
counts
d
Transmission
d
pulse counting
0.2
100
4.00E-06
0
0
0
0
768
124
11018
0.29892
0.305077
6426
0.305077
6386
0.30506
6361
0.305044
6515
0.305027
6349
0.305011
6371
0.304994
6508
0.304978
6446
0.304961
6461
0.304945
6455
0.304928
6487
0.304912
6504
0.304895
6540
0.304879
6588
0.304862
6562
0.304846
6414
0.304829
6508
0.304813
6467
0.304796
6508
0.30478
6514
0.304763
6464
0.304747
6525
0.30473
6626
0.304714
6548
0.304697
6375
0.304681
6492
0.304664
6324
0.304648
6542
0.304631
6492
0.304615
6562
0.304599
6326
0.304582
6469
0.304566
6483
0.304549
6368
0.304533
6470
0.304516
6558
0.3045
6191
0.304483
6278
0.304467
6408
0.304451
6418
0.304434
6453
0.304418
6547
0.304401
6380
0.304385
6405
0.304368
6456
0.304352
6276
0.304336
6381
0.304319
6377
0.304303
6255
0.304286
6242
0.30427
6248
0.304254
6359
0.304237
6336
0.304221
6263
0.304204
6275
0.304188
6279
0.304172
6164
0.304155
6125
0.304139
6160
0.304123
6158
0.304106
6152
0.30409
6180
0.304073
6179
0.304057
6166
0.304041
6199
0.304024
6116
0.304008
6207
0.303992
6138
0.303975
6295
0.303959
6370
0.303942
6183
0.303926
6193
0.30391
6192
0.303893
6139
0.303877
6123
0.303861
6138
0.303844
6136
0.303828
6140
0.303812
6185
0.303795
6198
0.303779
6152
0.303763
6152
0.303746
6089
0.30373
6179
0.303714
6231
0.303697
6164
0.303681
6110
0.303665
6064
0.303648
6234
0.303632
6259
0.303616
6204
0.3036
6322
0.303583
6170
0.303567
6222
0.303551
6290
0.303534
6317
0.303518
6417
0.303502
6342
0.303485
6399
0.303469
6168
0.303453
6211
0.303437
6242
0.30342
6275
0.303404
6264
0.303388
6166
0.303371
6152
0.303355
6073
0.303339
6152
0.303323
6054
0.303306
6099
0.30329
6008
0.303274
6024
0.303258
5977
0.303241
6042
0.303225
5916
0.303209
5892
0.303193
5902
0.303176
5897
0.30316
5897
0.303144
5825
0.303128
5885
0.303111
5943
0.303095
5757
0.303079
5877
0.303063
5856
0.303046
5786
0.30303
5723
0.303014
5882
0.302998
5909
0.302982
5835
0.302965
5820
0.302949
6006
0.302933
5786
0.302917
5900
0.3029
5877
0.302884
5984
0.302868
6112
0.302852
6085
0.302836
6116
0.302819
6151
0.302803
6452
0.302787
6349
0.302771
6321
0.302755
6487
0.302739
6469
0.302722
6666
0.302706
6757
0.30269
6745
0.302674
6901
0.302658
6953
0.302641
7010
0.302625
6910
0.302609
6882
0.302593
6921
0.302577
6917
0.302561
6939
0.302544
6909
0.302528
6918
0.302512
7011
0.302496
7101
0.30248
7030
0.302464
7132
0.302448
7367
0.302431
7705
0.302415
7965
0.302399
8253
0.302383
8706
0.302367
9142
0.302351
9736
0.302335
9883
0.302319
10122
0.302302
10105
0.302286
10394
0.30227
10280
0.302254
10139
0.302238
9893
0.302222
9580
0.302206
9381
0.30219
9205
0.302174
9118
0.302157
9027
0.302141
9167
0.302125
9142
0.302109
9403
0.302093
9382
0.302077
9372
0.302061
9710
0.302045
9896
0.302029
10156
0.302013
10182
0.301997
10401
0.30198
10326
0.301964
10670
0.301948
10797
0.301932
10921
0.301916
10803
0.3019
10911
0.301884
11018
0.301868
10899
0.301852
10907
0.301836
10715
0.30182
10509
0.301804
10377
0.301788
10137
0.301772
9560
0.301756
9279
0.30174
8938
0.301724
8501
0.301707
8119
0.301691
7559
0.301675
7199
0.301659
6821
0.301643
6412
0.301627
5944
0.301611
5374
0.301595
5069
0.301579
4657
0.301563
4464
0.301547
4369
0.301531
3955
0.301515
3764
0.301499
3629
0.301483
3558
0.301467
3207
0.301451
3249
0.301435
3150
0.301419
3045
0.301403
3042
0.301387
3035
0.301371
3017
0.301355
3057
0.301339
3034
0.301323
3065
0.301307
3054
0.301291
3169
0.301275
3299
0.301259
3400
0.301243
3569
0.301227
3740
0.301211
3924
0.301195
4245
0.301179
4444
0.301164
4856
0.301148
5008
0.301132
5454
0.301116
5694
0.3011
6143
0.301084
6390
0.301068
6842
0.301052
7061
0.301036
7258
0.30102
7301
0.301004
7534
0.300988
7700
0.300972
7858
0.300956
7670
0.30094
7979
0.300924
8054
0.300908
8149
0.300893
8131
0.300877
8101
0.300861
8255
0.300845
8524
0.300829
8702
0.300813
8890
0.300797
9183
0.300781
9453
0.300765
9856
0.300749
9858
0.300733
10087
0.300718
10497
0.300702
10578
0.300686
10667
0.30067
10590
0.300654
10922
0.300638
10554
0.300622
10128
0.300606
9914
0.30059
9720
0.300575
9288
0.300559
8741
0.300543
8256
0.300527
8014
0.300511
7598
0.300495
7166
0.300479
6812
0.300463
6377
0.300448
6206
0.300432
5891
0.300416
5562
0.3004
5467
0.300384
5380
0.300368
5129
0.300352
5006
0.300337
4869
0.300321
4637
0.300305
4705
0.300289
4514
0.300273
4352
0.300257
4135
0.300242
4100
0.300226
3961
0.30021
3890
0.300194
3767
0.300178
3696
0.300163
3655
0.300147
3469
0.300131
3434
0.300115
3321
0.300099
3303
0.300083
3155
0.300068
3125
0.300052
3072
0.300036
2954
0.30002
3008
0.300004
2861
0.299989
2789
0.299973
2703
0.299957
2727
0.299941
2553
0.299925
2497
0.29991
2322
0.299894
2250
0.299878
2094
0.299862
1946
0.299847
1896
0.299831
1664
0.299815
1573
0.299799
1459
0.299783
1201
0.299768
1138
0.299752
1058
0.299736
907
0.29972
766
0.299705
628
0.299689
570
0.299673
483
0.299657
449
0.299642
374
0.299626
300
0.29961
310
0.299594
265
0.299579
201
0.299563
198
0.299547
182
0.299532
196
0.299516
180
0.2995
168
0.299484
181
0.299469
169
0.299453
160
0.299437
148
0.299421
166
0.299406
157
0.29939
159
0.299374
139
0.299359
160
0.299343
152
0.299327
149
0.299312
152
0.299296
134
0.29928
152
0.299264
144
0.299249
137
0.299233
131
0.299217
145
0.299202
169
0.299186
150
0.29917
147
0.299155
157
0.299139
135
0.299123
172
0.299108
163
0.299092
147
0.299076
134
0.299061
124
0.299045
131
0.299029
135
0.299014
150
0.298998
146
0.298982
148
0.298967
144
0.298951
135
0.298935
127
0.29892

OLD OXIDIZED Si3N4 COATING  (ION ETCHED: 2KV, 4 MIN)
2003
5
10
14
53
42
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
0
1000
2000
55
0
data_7
data_7
-1
Binding energy
eV
3
-0.023622
2
counts
d
Transmission
d
pulse counting
0.2
1
4.00E-06
0
0
0
0
256
0
0.995
0.300125
0.300489
0
0.300489
0
0.300486
0
0.300483
0
0.30048
0
0.300477
0
0.300474
0
0.300471
0
0.300468
0
0.300466
0
0.300463
0
0.30046
0
0.300457
0
0.300454
0
0.300451
0
0.300448
0
0.300445
0
0.300443
0
0.30044
0
0.300437
0
0.300434
0
0.300431
0
0.300428
0
0.300425
0
0.300423
0
0.30042
0
0.300417
0
0.300414
0
0.300411
0
0.300408
0
0.300405
0
0.300402
0
0.3004
0
0.300397
0
0.300394
0
0.300391
0
0.300388
0
0.300385
0
0.300382
0
0.30038
0
0.300377
0
0.300374
0
0.300371
0
0.300368
0
0.300365
0
0.300362
0
0.300359
0
0.300357
0
0.300354
0
0.300351
0
0.300348
0
0.300345
0
0.300342
0
0.300339
0
0.300336
0
0.300334
0
0.300331
0
0.300328
0
0.300325
0
0.300322
0
0.300319
0
0.300316
0
0.300314
0
0.300311
0
0.300308
0
0.300305
0
0.300302
0
0.300299
0
0.300296
0
0.300293
0
0.300291
0
0.300288
0
0.300285
0
0.300282
0
0.300279
0
0.300276
0
0.300273
0
0.300271
0
0.300268
0
0.300265
0
0.300262
0
0.300259
0
0.300256
0
0.300253
0
0.300251
0.995
0.300248
0
0.300245
0
0.300242
0
0.300239
0
0.300236
0
0.300233
0
0.30023
0
0.300228
0
0.300225
0
0.300222
0
0.300219
0
0.300216
0
0.300213
0
0.30021
0
0.300208
0
0.300205
0
0.300202
0
0.300199
0
0.300196
0
0.300193
0
0.30019
0
0.300188
0
0.300185
0
0.300182
0
0.300179
0
0.300176
0
0.300173
0
0.30017
0
0.300167
0
0.300165
0
0.300162
0
0.300159
0
0.300156
0
0.300153
0
0.30015
0
0.300147
0
0.300145
0
0.300142
0
0.300139
0
0.300136
0
0.300133
0
0.30013
0
0.300127
0
0.300125
end of experiment
